High-energy x-ray nanotomography introducing an apodization Fresnel zone plate objective lens

In this study, high-energy x-ray nanotomography (nano-computed tomography, nano-CT) based on full-field microscopy was developed. Fine two-dimensional and three-dimensional (3D) structures with linewidths of 75 nm–100 nm were successfully resolved in the energy range 15 keV–37.7 keV. The effective field view ∼60 µm, typical measurement time for one tomographic scan 30 min–60 min. optical system established at 250-m-long beamline 20XU SPring-8 to realize greater than 100× magnification images. An apodization Fresnel zone plate (A-FZP), specifically developed imaging, used as objective lens. design A-FZP imaging is discussed, its diffraction efficiency distribution evaluated. spatial resolutions energies keV, 20 37.7 keV examined using a test object, measured values are shown be good agreement theoretical values. High-energy nano-CT combination micro-CT applied 3D multiscale imaging. entire bodies bulky samples, ∼1 mm diameter, micro-CT, nondestructive observation regions interest. Examples CT measurements involving carbon steel, mouse bones, meteorite discussed.